ENERGY-ABSORPTION IN POLY (BUTENE-1 SULFONE) ELECTRON RESIST

被引：0
|
作者：
BOWDEN, MJ [1 ]
机构：
[1] BELL TEL LABS INC,MURRAY HILL,NJ 07974
来源：
ABSTRACTS OF PAPERS OF THE AMERICAN CHEMICAL SOCIETY | 1977年 / 174卷 / SEP期
关键词：
D O I：
暂无
中图分类号：
O6 [化学];
学科分类号：
0703 ;
摘要：
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页码：22 / 22
页数：1
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