共 50 条
- [41] MODELING OF BEAM VOLTAGE EFFECTS IN ELECTRON-BEAM ANNEALING JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1979, 16 (06): : 1847 - 1852
- [44] ELECTRON-BEAM METROLOGY IN SEMICONDUCTOR BASIC ELEMENTS PTB-MITTEILUNGEN, 1984, 94 (05): : 330 - 333
- [50] ELECTRON-BEAM LITHOGRAPHY IN TELECOMMUNICATIONS DEVICE FABRICATION .1. ELECTRON-BEAM LITHOGRAPHY MACHINES BRITISH TELECOM TECHNOLOGY JOURNAL, 1989, 7 (01): : 25 - 43