EVALUATION OF SEMICONDUCTOR WAFERS UTILIZING SUPERCONDUCTING PHOTORELAXATION SPECTROSCOPY

被引：0
|
作者：
KASAI, Y [1 ]
SUGISHITA, A [1 ]
MOCHIKU, T [1 ]
IGUCHI, I [1 ]
机构：
[1] UNIV TSUKUBA,INST MAT SCI,SAKURA,IBARAKI 305,JAPAN
来源：
JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS | 1987年 / 26卷
关键词：
D O I：
10.7567/JJAPS.26S1.227
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
引用
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页码：227 / 229
页数：3
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