EVALUATION OF SEMICONDUCTOR WAFERS UTILIZING SUPERCONDUCTING PHOTORELAXATION SPECTROSCOPY

被引：0

作者：

KASAI, Y ^{[1
]}

SUGISHITA, A ^{[1
]}

MOCHIKU, T ^{[1
]}

IGUCHI, I ^{[1
]}

机构：

[1] UNIV TSUKUBA,INST MAT SCI,SAKURA,IBARAKI 305,JAPAN

来源：

JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS | 1987年 / 26卷

关键词：

D O I：

10.7567/JJAPS.26S1.227

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：227 / 229

页数：3

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