NUCLEATION AND GROWTH OF THIN-FILMS

被引：0

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作者：

REICHELT, K ^{[1
]}

机构：

[1] FORSCHUNGSZENTRUM JULICH, IFF, D-5170 JULICH 1, FED REP GER

来源：

VACUUM | 1986年 / 36卷 / 10期

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D O I：

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中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

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页码：701 / 702

页数：2

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