NUCLEATION AND GROWTH OF THIN-FILMS

被引：170

|

作者：

REICHELT, K

机构：

来源：

VACUUM | 1988年 / 38卷 / 12期

关键词：

D O I：

10.1016/0042-207X(88)90004-8

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

收藏

页码：1083 / 1099

页数：17

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