CO2-LASER CUTTING OF SILICON-NITRIDE - POSSIBILITIES AND LIMITS

被引：3
|
作者：
WIELAGE, B
DROZAK, J
机构：
来源：
MATERIALWISSENSCHAFT UND WERKSTOFFTECHNIK | 1990年 / 21卷 / 09期
关键词：
D O I：
10.1002/mawe.19900210905
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
引用
收藏
页码：337 / 341
页数：5
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