STRUCTURE OF SPUTTERED AMORPHOUS ALUMINA COATINGS

被引：0
|
作者：
ROTH, T
BROSZEIT, E
KLOOS, KH
机构：
来源：
ZEITSCHRIFT FUR WERKSTOFFTECHNIK-MATERIALS TECHNOLOGY AND TESTING | 1987年 / 18卷 / 01期
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中图分类号：
T [工业技术];
学科分类号：
08 ;
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页码：9 / 15
页数：7
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