SOLAR FURNACE ANNEALING OF AMORPHOUS SI LAYERS

被引：16
|
作者：
LAU, SS
ALLMEN, MV
GOLECKI, I
NICOLET, MA
KENNEDY, EF
TSENG, WF
机构：
来源：
APPLIED PHYSICS LETTERS | 1979年 / 35卷 / 04期
关键词：
D O I：
10.1063/1.91109
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
引用
收藏
页码：327 / 329
页数：3
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