X-RAY-IMAGING OF NANOSTRUCTURE PATTERNS

被引：12

作者：

VLADIMIRSKY, Y ^{[1
]}

KERN, D ^{[1
]}

MEYERILSE, W ^{[1
]}

ATTWOOD, D ^{[1
]}

机构：

[1] UNIV CALIF BERKELEY LAWRENCE BERKELEY LAB,CTR X-RAY OPT,BERKELEY,CA 94720

来源：

关键词：

D O I：

10.1063/1.100990

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：286 / 288

页数：3

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