TRIMETHYLGALLIUM SUPPLY WITHOUT THE USE OF BUBBLING IN GAAS GROWTH BY METALORGANIC VAPOR-PHASE EPITAXY

被引:0
|
作者
OHUCHI, A
OHNO, H
OHTSUKA, S
HASEGAWA, H
机构
关键词
D O I
10.1143/JJAP.27.2420
中图分类号
O59 [应用物理学];
学科分类号
摘要
引用
收藏
页码:2420 / 2420
页数:1
相关论文
共 50 条
  • [41] VAPOR-PHASE EPITAXY OF GAAS
    RAO, YK
    HAN, HG
    JOURNAL OF METALS, 1987, 39 (10): : A54 - A54
  • [42] COMPOSITIONAL LATCHING IN GAAS1-XPX/GAAS METALORGANIC VAPOR-PHASE EPITAXY
    MIURA, Y
    ONABE, K
    XIONG, Z
    NITTA, Y
    FUKATSU, S
    SHIRAKI, Y
    ITO, R
    JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS, 1991, 30 (4B): : L664 - L667
  • [43] INFLUENCE OF GROWTH PARAMETERS IN GAAS VAPOR-PHASE EPITAXY
    HOLLAN, L
    DURAND, JM
    CADORET, R
    JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1977, 124 (01) : 135 - 139
  • [44] Characterization of carbon-doped GaAs grown by metalorganic vapor-phase epitaxy
    Gong, YN
    Mo, JJ
    Yu, HS
    Wang, L
    Xia, GQ
    JOURNAL OF CRYSTAL GROWTH, 1999, 206 (04) : 271 - 278
  • [45] THERMOELASTIC STRAIN IN ZNSE FILMS GROWN ON GAAS BY METALORGANIC VAPOR-PHASE EPITAXY
    SHIBATA, N
    OHKI, A
    ZEMBUTSU, S
    KATSUI, A
    JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS & EXPRESS LETTERS, 1988, 27 (04): : L487 - L489
  • [46] EXCIMER LASER-ASSISTED METALORGANIC VAPOR-PHASE EPITAXY OF CDTE ON GAAS
    ZINCK, JJ
    BREWER, PD
    JENSEN, JE
    OLSON, GL
    TUTT, LW
    APPLIED PHYSICS LETTERS, 1988, 52 (17) : 1434 - 1436
  • [47] ZN DELTA-DOPED GAAS GROWN BY METALORGANIC VAPOR-PHASE EPITAXY
    LI, G
    LINNARSSON, M
    JAGADISH, C
    JOURNAL OF CRYSTAL GROWTH, 1995, 154 (3-4) : 231 - 239
  • [48] MICROSTRUCTURES OF (IN,GA)P ALLOYS GROWN ON GAAS BY METALORGANIC VAPOR-PHASE EPITAXY
    FOLLSTAEDT, DM
    SCHNEIDER, RP
    JONES, ED
    JOURNAL OF APPLIED PHYSICS, 1995, 77 (07) : 3077 - 3087
  • [49] MONOLAYER GROWTH OSCILLATIONS AND SURFACE-STRUCTURE OF GAAS(001) DURING METALORGANIC VAPOR-PHASE EPITAXY GROWTH
    REINHARDT, F
    JONSSON, J
    ZORN, M
    RICHTER, W
    PLOSKA, K
    RUMBERG, J
    KURPAS, P
    JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1994, 12 (04): : 2541 - 2546
  • [50] METALORGANIC VAPOR-PHASE EPITAXIAL-GROWTH OF GAINASP/GAAS
    KNAUER, A
    ERBERT, G
    GRAMLICH, S
    OSTER, A
    RICHTER, E
    ZEIMER, U
    WEYERS, M
    JOURNAL OF ELECTRONIC MATERIALS, 1995, 24 (11) : 1655 - 1658