SILICON MACH-ZEHNDER WAVE-GUIDE INTERFEROMETERS OPERATING AT 1.3 MU-M

被引：91

作者：

TREYZ, GV

机构：

[1] IBM Research, T. J. Watson Research Center, Yorktown Heights, New York 10598

来源：

ELECTRONICS LETTERS | 1991年 / 27卷 / 02期

关键词：

MICROWAVE DEVICES AND COMPONENTS; INTERFEROMETERS;

D O I：

10.1049/el:19910079

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

Mach-Zehnder waveguide interferometers have been fabricated in silicon and operation has been demonstrated at lambda = 1.3-mu-m. The switching mechanism is based on the thermally induced variation of the refractive index of crystalline silicon. Modulation depths of 40% were obtained for switching powers of 30 mW and switching times of 50-mu-s.

引用

页码：118 / 120

页数：3

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