INSITU ELLIPSOMETRY AS A DIAGNOSTIC OF THIN-FILM GROWTH - STUDIES OF AMORPHOUS-CARBON

被引：26

作者：

COLLINS, RW ^{[1
]}

机构：

[1] PENN STATE UNIV,DEPT PHYS,UNIVERSITY PK,PA 16802

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS | 1989年 / 7卷 / 03期

关键词：

D O I：

10.1116/1.576289

中图分类号：

TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

引用

页码：1378 / 1385

页数：8

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