THERMAL-DIFFUSIVITY MEASUREMENT OF A THIN-FILM IN THE DIRECTION ACROSS THE FILM BY AC CALORIMETRIC METHOD

被引：11

作者：

KATO, R ^{[1
]}

MAESONO, A ^{[1
]}

HATTA, I ^{[1
]}

机构：

[1] NAGOYA UNIV,DEPT APPL PHYS,NAGOYA 46401,JAPAN

来源：

JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS | 1993年 / 32卷 / 08期

关键词：

THERMAL DIFFUSIVITY; THERMOPHYSICAL PROPERTY; THIN FILMS; AC CALORIMETRY; AC TEMPERATURE; TEMPERATURE WAVES;

D O I：

10.1143/JJAP.32.3653

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

A method utilizing ac calorimetry for measuring thermal diffusivity of a thin film in the direction across the film is proposed based on both theoretical analysis and experimental examination. The sample system is composed of three parts: a medium, a thin film sample and a second medium. For precise measurement, it is essential that one of the two media is made of the same material as the thin film sample. With this system, a thin polyimide film with thickness of 75 mum was experimentally examined in the frequency range from 4 to 140 Hz at room temperature. The standard deviation of the analyzed thermal diffusivity was less than 0.2%. The value of the thermal diffusivity is consistent with that obtained with a laser flash method.

引用

页码：3653 / 3655

页数：3

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