THERMAL-DIFFUSIVITY MEASUREMENT OF A THIN-FILM IN THE DIRECTION ACROSS THE FILM BY AC CALORIMETRIC METHOD

被引：11
|
作者：
KATO, R [1 ]
MAESONO, A [1 ]
HATTA, I [1 ]
机构：
[1] NAGOYA UNIV,DEPT APPL PHYS,NAGOYA 46401,JAPAN
来源：
JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS | 1993年 / 32卷 / 08期
关键词：
THERMAL DIFFUSIVITY; THERMOPHYSICAL PROPERTY; THIN FILMS; AC CALORIMETRY; AC TEMPERATURE; TEMPERATURE WAVES;
D O I：
10.1143/JJAP.32.3653
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
A method utilizing ac calorimetry for measuring thermal diffusivity of a thin film in the direction across the film is proposed based on both theoretical analysis and experimental examination. The sample system is composed of three parts: a medium, a thin film sample and a second medium. For precise measurement, it is essential that one of the two media is made of the same material as the thin film sample. With this system, a thin polyimide film with thickness of 75 mum was experimentally examined in the frequency range from 4 to 140 Hz at room temperature. The standard deviation of the analyzed thermal diffusivity was less than 0.2%. The value of the thermal diffusivity is consistent with that obtained with a laser flash method.
引用
收藏
页码：3653 / 3655
页数：3
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