A BOUNDED-ERROR APPROACH TO ACCURACY ANALYSIS IN ELLIPSOMETRY

被引：2
|
作者：
SMIT, MK [1 ]
VERHOOF, JW [1 ]
机构：
[1] DELFT UNIV TECHNOL,DEPT ELECT ENGN,TELECOMMUN & REMOTE SENSING TECHNOL LAB,2600 GA DELFT,NETHERLANDS
来源：
MATHEMATICS AND COMPUTERS IN SIMULATION | 1990年 / 32卷 / 5-6期
关键词：
D O I：
10.1016/0378-4754(90)90010-G
中图分类号：
TP39 [计算机的应用];
学科分类号：
081203 ; 0835 ;
摘要：
A nonlinear Bounded-Error Estimation method is applied to the case of ellipsometric measurement of film properties. It is shown that this method can be used with advantage for estimating the magnitude of the measurement errors including systematic errors.
引用
收藏
页码：545 / 551
页数：7
相关论文
共 50 条
  • [31] Optimal experiment design for bounded-error estimation of nonlinear models
    Denis-Vidal, Liliane
    Jauberthie, Carine
    Kieffer, Michel
    2019 IEEE 58TH CONFERENCE ON DECISION AND CONTROL (CDC), 2019, : 4147 - 4154
  • [32] Guaranteed nonlinear parameter estimation from bounded-error data via interval analysis
    Jaulin, L.
    Walter, E.
    Mathematics and Computers in Simulation, 1993, 35 (02):
  • [33] Topology Error Identification with a Bounded-error Modeling of Measurements Uncertainty in Power System
    Wang, Bin
    He, Guang-yu
    Li, Bang-feng
    Xing, Tao
    Yu, Jia-xi
    INTERNATIONAL CONFERENCE ON ELECTRICAL, CONTROL AND AUTOMATION ENGINEERING (ECAE 2013), 2013, : 367 - 371
  • [34] Prefix-based Bounded-error Estimation with Intermittent Observations
    Rutledge, Kwesi J.
    Yong, Sze Zheng
    Ozay, Necmiye
    2019 AMERICAN CONTROL CONFERENCE (ACC), 2019, : 4320 - 4325
  • [35] Towards solving inverse optimal control in a bounded-error framework
    Panchea, Adina M.
    Ramdani, Nacim
    2015 AMERICAN CONTROL CONFERENCE (ACC), 2015, : 4910 - 4915
  • [36] Bounded-error parameter estimation: Noise models and recursive algorithms
    Bai, EW
    Nagpal, KM
    Tempo, R
    AUTOMATICA, 1996, 32 (07) : 985 - 999
  • [37] Experimental Comparison of Bounded-Error State Estimation and Constraints Propagation
    Vincke, Bastien
    Lambert, Alain
    2011 IEEE INTERNATIONAL CONFERENCE ON ROBOTICS AND AUTOMATION (ICRA), 2011,
  • [38] Consistent Outdoor Vehicle Localization by Bounded-Error State Estimation
    Lambert, Alain
    Gruyer, Dominique
    Vincke, Bastien
    Seignez, Emmanuel
    2009 IEEE-RSJ INTERNATIONAL CONFERENCE ON INTELLIGENT ROBOTS AND SYSTEMS, 2009, : 1211 - 1216
  • [39] Distributed Bounded-Error Parameter and State Estimation in Networks of Sensors
    Kieffer, Michel
    NUMERICAL VALIDATION IN CURRENT HARDWARE ARCHITECTURES, 2009, 5492 : 189 - 202
  • [40] Automotive vehicle sideslip angles estimation in a bounded-error context
    Fergani, S.
    Jauberthie, C.
    Trave-Massuyes, L.
    IFAC PAPERSONLINE, 2017, 50 (01): : 14830 - 14835
12345