MASS-DISPERSIVE RECOIL SPECTROMETRY STUDIES OF OXYGEN AND NITROGEN REDISTRIBUTION IN ION-BEAM-SYNTHESIZED BURIED OXYNITRIDE LAYERS IN SILICON

被引：11

|

作者：

WHITLOW, HJ ^{[1
]}

PETERSSON, CS ^{[1
]}

REESON, KJ ^{[1
]}

HEMMENT, PLF ^{[1
]}

机构：

[1] UNIV SURREY,DEPT ELECTR & ELECT ENGN,GUILDFORD GU2 5XH,SURREY,ENGLAND

来源：

APPLIED PHYSICS LETTERS | 1988年 / 52卷 / 22期

关键词：

D O I：

10.1063/1.99733

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

收藏

页码：1871 / 1873

页数：3

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[21] Comparison of the submicron particle analysis capabilities of Auger electron spectroscopy, time-of-flight secondary ion mass spectrometry, and scanning electron microscopy with energy dispersive x-ray spectroscopy for particles deposited on silicon wafers with 1 μm thick oxide layers
Diebold, AC
Lindley, P
Viteralli, J
Kingsley, J
Liu, BYH
Woo, KS
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1998, 16 (03): : 1825 - 1831
[22] Comparison of the submicron particle analysis capabilities of Auger electron spectroscopy, time-of-flight secondary ion mass spectrometry, and scanning electron microscopy with energy dispersive x-ray spectroscopy for particles deposited on silicon wafers with one micron thick oxide layers (vol 16, pg 1825, 1998)
Diebold, AC
Lindley, P
Viteralli, J
Kingsley, J
Liu, BYH
Woo, KS
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1998, 16 (05): : 3148 - 3148