MASS-DISPERSIVE RECOIL SPECTROMETRY STUDIES OF OXYGEN AND NITROGEN REDISTRIBUTION IN ION-BEAM-SYNTHESIZED BURIED OXYNITRIDE LAYERS IN SILICON

被引：11
|
作者：
WHITLOW, HJ [1 ]
PETERSSON, CS [1 ]
REESON, KJ [1 ]
HEMMENT, PLF [1 ]
机构：
[1] UNIV SURREY,DEPT ELECTR & ELECT ENGN,GUILDFORD GU2 5XH,SURREY,ENGLAND
来源：
APPLIED PHYSICS LETTERS | 1988年 / 52卷 / 22期
关键词：
D O I：
10.1063/1.99733
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
引用
收藏
页码：1871 / 1873
页数：3
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