共 50 条
- [31] GAAS AND ALGAAS ANISOTROPIC FINE PATTERN ETCHING USING A NEW REACTIVE ION-BEAM ETCHING SYSTEM JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1985, 3 (01): : 402 - 405
- [32] LOW-ENERGY ETCHING OF GAAS USING A SINGLE-GRID ION-BEAM JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1992, 10 (01): : 67 - 70
- [33] CHARACTERIZATION OF DAMAGE ON GAAS IN A REACTIVE ION-BEAM ETCHING SYSTEM USING SCHOTTKY DIODES JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1988, 6 (03): : 876 - 879
- [35] AN IMPROVED TECHNIQUE FOR FABRICATING HIGH QUANTUM EFFICIENCY RIDGE WAVE-GUIDE ALGAAS/GAAS QUANTUM-WELL LASERS JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, 1986, 25 (09): : 1443 - 1444
- [37] Fabrication of integrated twin-guide corner reflector surface-emitting lasers with reactive ion-beam etching 1997 IEEE INTERNATIONAL SYMPOSIUM ON COMPOUND SEMICONDUCTORS, 1998, : 345 - 348
- [38] Fabrication of integrated twin-guide corner reflector surface-emitting lasers with reactive ion-beam etching COMPOUND SEMICONDUCTORS 1997, 1998, 156 : 345 - 348