SPUTTERED OF ZnO: Al THIN FILMS FOR APPLICATION IN PHOTOVOLTAIC SOLAR CELLS

被引：0
|
作者：
Flickyngerova, Sona [1 ]
Rehakova, Anna [1 ]
Tvarozek, Vladimir [1 ]
Novotny, Ivan [1 ]
机构：
[1] Univ Technol Bratislava, Dep Microelect, Ilkovicova 3, SK-81219 Bratislava, Slovakia
来源：
ADVANCES IN ELECTRICAL AND ELECTRONIC ENGINEERING | 2008年 / 7卷 / 1-2期
关键词：
D O I：
暂无
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
High transparent and conductive, aluminium - doped zinc oxide thin films (ZnO:Al), were prepared by radio frequency (RF) diode sputtering from ZnO+2 wt. % Al2O3 target on Eutal glass substrates. Surfaces of the samples were treated by various technological steps during preparation. The ion bombardment and the substrate temperature modified their structure, surface morphology, electrical and optical parameters. In this work we present changes between samples prepared at room temperature (RT) and at 200 degrees C, between samples on ion etched substrate and non-modified substrate, and effect of ion etching of the sample surface. We measured transmittance, resistivity and microroughness by AFM on all samples.
引用
收藏
页码：382 / 384
页数：3
相关论文
共 50 条
  • [31] Electrodeposition and characterization of ZnO thin films using sodium thiosulfate as an additive for photovoltaic solar cells
    Hassiba Rahal
    Rafiaa Kihal
    Abed Mohamed Affoune
    Mokhtar Ghers
    Faycal Djazi
    Journal of Semiconductors, 2017, (05) : 15 - 21
  • [32] Reactive DC Magnetron Sputtered ZnO Thin Films for Piezoelectric Application
    Abinaya, M.
    Dhanisha, K. M.
    Cristopher, M. Manoj
    Raj, P. Deepak
    Jeyadheepan, K.
    Sridharan, M.
    INTERNATIONAL JOURNAL OF NANOSCIENCE, 2018, 17 (03)
  • [33] High transmittance and low resistive ZnO:Al films for thin film solar cells
    Yoo, J
    Lee, J
    Kim, S
    Yoon, K
    Park, IJ
    Dhungel, SK
    Karunagaran, B
    Mangalaraj, D
    Yi, JS
    THIN SOLID FILMS, 2005, 480 : 213 - 217
  • [34] Investigation of carrier transport in ZnO and ZnO:Al thin films sputtered at different oxygen conditions
    Novak, Petr
    Nedvedova, Lucie
    Kozak, Tomas
    Sotova, Petra
    Blahova, Olga
    Jansa, Zdenek
    Medlin, Rostislav
    Netrvalova, Marie Frank
    Minar, Jan
    THIN SOLID FILMS, 2023, 780
  • [35] Investigation of the Annealing Time Effects on the Properties of Sputtered ZnO:Al Thin Films
    Kim, Deok Kyu
    Kim, Hong Bae
    APPLIED SCIENCE AND CONVERGENCE TECHNOLOGY, 2014, 23 (06): : 366 - 370
  • [36] Optical and electrical properties of RF magnetron sputtered ZnO:Al thin films
    Dimova-Malinovska, D
    Tzenov, N
    Tzolov, M
    Vassilev, L
    MATERIALS SCIENCE AND ENGINEERING B-SOLID STATE MATERIALS FOR ADVANCED TECHNOLOGY, 1998, 52 (01): : 59 - 62
  • [37] Electrical and Optical Characteristics of ZnO:Al Films Prepared by rf Magnetron Sputtering for Thin Film Solar Cells Application
    Jeon, Sang Won
    Lee, Jeong Chul
    Park, Byung Ok
    Song, Jin Soo
    Yoon, Kyung Hoon
    KOREAN JOURNAL OF MATERIALS RESEARCH, 2006, 16 (01): : 19 - 24
  • [38] PROPERTIES OF INDIUM DOPED CdS THIN FILMS AND THEIR PHOTOVOLTAIC APPLICATION IN CdTe SOLAR CELLS
    Chen, Y.
    Wang, F.
    Xu, H.
    Ren, S.
    Gu, H.
    Wu, L.
    Wang, W.
    Feng, L.
    CHALCOGENIDE LETTERS, 2017, 14 (01): : 1 - 9
  • [39] Al Concentration Effect on ZnO Based Thin Films for Photovoltaic Applications
    Ghomrani, F. Z.
    Aissat, A.
    Arbouz, H.
    Benkouider, A.
    INTERNATIONAL CONFERENCE ON TECHNOLOGIES AND MATERIALS FOR RENEWABLE ENERGY, ENVIRONMENT AND SUSTAINABILITY -TMREES15, 2015, 74 : 491 - 498
  • [40] Morphology evolution of ZnO thin films from aqueous solutions and their application to solar cells
    Gao, YF
    Nagai, M
    LANGMUIR, 2006, 22 (08) : 3936 - 3940
12345