SPUTTERING DUE TO NEGATIVE OXYGEN IONS IN OXYGEN DISCHARGES

被引：8

|

作者：

JENNINGS, TA

MCNEILL, W

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来源：

APPLIED PHYSICS LETTERS | 1968年 / 12卷 / 02期

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D O I：

10.1063/1.1651877

中图分类号：

O59 [应用物理学];

学科分类号：

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页码：25 / &

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