SPUTTERING DUE TO NEGATIVE OXYGEN IONS IN OXYGEN DISCHARGES

被引：8
|
作者：
JENNINGS, TA
MCNEILL, W
机构：
来源：
APPLIED PHYSICS LETTERS | 1968年 / 12卷 / 02期
关键词：
D O I：
10.1063/1.1651877
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
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页码：25 / &
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