REAL-TIME OPTICAL PROFILOMETRY AS A PROBE OF RATES OF LASER-INDUCED CHEMICAL VAPOR-DEPOSITION

被引：10
|
作者：
COMITA, PB
KODAS, TT
机构：
来源：
JOURNAL OF APPLIED PHYSICS | 1987年 / 62卷 / 06期
关键词：
D O I：
10.1063/1.339484
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
引用
收藏
页码：2280 / 2285
页数：6
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