REAL-TIME OPTICAL PROFILOMETRY AS A PROBE OF RATES OF LASER-INDUCED CHEMICAL VAPOR-DEPOSITION

被引：10

|

作者：

COMITA, PB

KODAS, TT

机构：

来源：

JOURNAL OF APPLIED PHYSICS | 1987年 / 62卷 / 06期

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D O I：

10.1063/1.339484

中图分类号：

O59 [应用物理学];

学科分类号：

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页码：2280 / 2285

页数：6

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