AES INVESTIGATIONS OF AR+ ION RETENTION IN SI DURING AR SPUTTERING

被引：11
|
作者：
KEMPF, J
机构：
来源：
APPLIED PHYSICS | 1978年 / 16卷 / 01期
关键词：
D O I：
10.1007/BF00931420
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
引用
收藏
页码：43 / 46
页数：4
相关论文
共 50 条
  • [21] Sputtering of ice films by the bombardment of Ar+ ions
    Kutliev, U. O.
    COMPUTATIONAL MATERIALS SCIENCE, 2008, 43 (04) : 700 - 703
  • [22] OBLIQUE CONE FORMATION IN GE BY AR+ SPUTTERING
    CHINI, TK
    BHATTACHARYYA, SR
    GHOSE, D
    BASU, D
    VACUUM, 1992, 43 (03) : 219 - 222
  • [23] The surface transient effect in the Si sputtering yield by low energy O2+ and Ar+ ion bombardments
    Lee, HI
    Moon, DW
    Shin, HC
    Oh, SK
    Kang, HJ
    NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 2004, 219 : 959 - 962
  • [24] EFFECTS OF AR+ SPUTTERING AND THERMAL ANNEALING ON OPTICAL SCATTER FROM SI(100) AND SI(111)
    COHEN, MR
    SIMONSON, RJ
    ALTAMIRANO, MM
    CRITCHFIELD, KL
    KEMP, WT
    MEINHARDT, JA
    JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1993, 11 (04): : 971 - 975
  • [25] Effect of Ar+ ion sputtering on the electronic transport of MgB2 surface
    Xu, MX
    Xiao, ZW
    Takano, Y
    Hatano, T
    Fujita, D
    THIN SOLID FILMS, 2004, 464 : 61 - 64
  • [26] Peculiar properties of preferential sputtering of PbTe, SnTe, and GeTe by Ar+ ion plasma
    Zayachuk, D. M.
    Slynko, V. E.
    Csik, A.
    MATERIALS SCIENCE IN SEMICONDUCTOR PROCESSING, 2018, 88 : 103 - 108
  • [27] SURFACE-TOPOGRAPHY OF A CU SINGLE-CRYSTAL BY AR+ ION SPUTTERING
    SEN, AK
    GHOSE, D
    NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1991, 61 (02): : 253 - 255
  • [28] Macroscopic parameters of the interaction of an Ar+ ion beam with a Si pitch grating
    Bizyukov, Ivan
    Mutzke, Andreas
    Mayer, Matej
    Langhuth, Hagen
    Krieger, Karl
    Schneider, Ralf
    NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 2012, 278 : 4 - 7
  • [29] NE+ AND AR+ ION BOMBARDMENT-INDUCED TOPOGRAPHY ON SI
    CARTER, G
    VISHNYAKOV, V
    SURFACE AND INTERFACE ANALYSIS, 1995, 23 (7-8) : 514 - 520
  • [30] Sputter damage in Si surface by low energy Ar+ ion bombardment
    Shin, HC
    Oh, SK
    Kang, HJ
    Lee, HI
    Moon, DW
    CURRENT APPLIED PHYSICS, 2003, 3 (01) : 61 - 64
12345