SILICON HOMOEPITAXIAL THIN-FILMS VIA SILANE PYROLYSIS - HEED AND AUGER-ELECTRON SPECTROSCOPY STUDY

被引：80
作者：
HENDERSON, RC
HELM, RF
机构：
来源：
SURFACE SCIENCE | 1972年 / 30卷 / 02期
关键词：
D O I：
10.1016/0039-6028(72)90005-2
中图分类号：
O64 [物理化学（理论化学）、化学物理学];
学科分类号：
070304 ; 081704 ;
摘要：
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页码：310 / +
页数：1
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