SPUTTERING DEPOSITION, XPS AND X-RAY-DIFFRACTION CHARACTERIZATION OF HARD NITROGEN-PLATINUM THIN-FILMS

被引：11
|
作者：
HECQ, A [1 ]
DELRUE, JP [1 ]
HECQ, M [1 ]
ROBERT, T [1 ]
机构：
[1] UNIV ETAT MONS,FAC MED,CHIM GEN LAB,B-7000 MONS,BELGIUM
来源：
JOURNAL OF MATERIALS SCIENCE | 1981年 / 16卷 / 02期
关键词：
D O I：
10.1007/BF00738630
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
引用
收藏
页码：407 / 412
页数：6
相关论文
共 50 条
  • [31] GRAZING-INCIDENCE X-RAY-DIFFRACTION CHARACTERIZATION OF CO-PT MAGNETOOPTICAL THIN-FILMS
    HUANG, TC
    SAVOY, R
    FARROW, RFC
    MARKS, RF
    APPLIED PHYSICS LETTERS, 1993, 62 (12) : 1353 - 1355
  • [32] PECULIARITIES OF X-RAY-DIFFRACTION PATTERN AND ELECTRICAL-CONDUCTIVITY OF THIN-FILMS OF CDS
    HORODECKI, AJ
    LEPEK, M
    PRECHT, W
    KRISTALL UND TECHNIK-CRYSTAL RESEARCH AND TECHNOLOGY, 1978, 13 (01): : K18 - K20
  • [33] X-RAY-DIFFRACTION STUDY OF INTERDIFFUSION IN BIMETALLIC AG-CU THIN-FILMS
    MURAKAMI, M
    DEFONTAINE, D
    JOURNAL OF APPLIED PHYSICS, 1976, 47 (07) : 2857 - 2861
  • [34] RESIDUAL-STRESS DETERMINATION IN A 1000 A TUNGSTEN THIN-FILMS BY X-RAY-DIFFRACTION
    BADAWI, KF
    DECLEMY, A
    NAUDON, A
    GOUDEAU, P
    JOURNAL DE PHYSIQUE III, 1992, 2 (09): : 1741 - 1748
  • [35] AN X-RAY-DIFFRACTION STUDY OF THIN-FILMS OF THE SEMICONDUCTING COMPOUND A(II)B(V)
    YUREV, GS
    MARENKIN, SF
    ZHALILOV, NS
    INORGANIC MATERIALS, 1992, 28 (06) : 1025 - 1028
  • [36] X-RAY-DIFFRACTION (POLE FIGURE) STUDY OF THE EPITAXY OF GOLD THIN-FILMS ON GAAS
    LEUNG, S
    MILNES, AG
    CHUNG, DDL
    THIN SOLID FILMS, 1983, 104 (1-2) : 109 - 131
  • [37] DETERMINATION OF SURFACE-ROUGHNESS FROM X-RAY-DIFFRACTION MEASUREMENTS ON THIN-FILMS
    FISCHER, W
    WISSMANN, P
    APPLICATIONS OF SURFACE SCIENCE, 1982, 11-2 (JUL): : 109 - 117
  • [38] LOW-ANGLE X-RAY-DIFFRACTION AS A PROBE OF REACTIONS AT BURIED INTERFACES AND AS CHARACTERIZATION TECHNIQUE FOR THIN-FILMS
    NOVET, T
    KEVAN, S
    JOHNSON, DC
    MATERIALS SCIENCE AND ENGINEERING A-STRUCTURAL MATERIALS PROPERTIES MICROSTRUCTURE AND PROCESSING, 1995, 195 (1-2): : 21 - 27
  • [39] CLASSIFICATION AND QUALITY-CONTROL OF THIN-FILMS BY RECOGNITION OF X-RAY-DIFFRACTION LINES
    KAWARAI, S
    KOIKE, R
    SHINTANI, M
    FURUYA, N
    ELECTRONICS & COMMUNICATIONS IN JAPAN, 1973, 56 (01): : 79 - 84
  • [40] CHARACTERIZATION OF RF-SPUTTERED ZNO THIN-FILMS BY X-RAY-DIFFRACTION AND SCANNING ELECTRON-MICROSCOPY
    SEN, S
    LEARY, DJ
    BAUER, CL
    THIN SOLID FILMS, 1982, 94 (01) : 7 - 14
12345