BEHAVIOR OF ION-IMPLANTED JUNCTION DIODES IN 3C SIC

被引：22
|
作者：
AVILA, RE [1 ]
KOPANSKI, JJ [1 ]
FUNG, CD [1 ]
机构：
[1] CASE WESTERN RESERVE UNIV,CASE INST TECHNOL,DEPT ELECT ENGN,CLEVELAND,OH 44106
来源：
JOURNAL OF APPLIED PHYSICS | 1987年 / 62卷 / 08期
关键词：
D O I：
10.1063/1.339291
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
引用
收藏
页码：3469 / 3471
页数：3
相关论文
共 50 条
  • [41] ACTIVATION OF ION-IMPLANTED DOPANTS IN ALPHA-SIC
    AHMED, S
    BARBERO, CJ
    SIGMON, TW
    APPLIED PHYSICS LETTERS, 1995, 66 (06) : 712 - 714
  • [42] Photoluminescence from Er-implanted polycrystalline 3C SiC
    Uekusa, S
    Awahara, K
    Kumagai, M
    IEEE TRANSACTIONS ON ELECTRON DEVICES, 1999, 46 (03) : 572 - 576
  • [43] Annealing properties of defects in ion-implanted 3C-SiC studied using monoenergetic positron beams
    Uedono, A
    Itoh, H
    Ohshima, T
    Suzuki, R
    Ohdaira, T
    Tanigawa, S
    Aoki, Y
    Yoshikawa, M
    Nashiyama, I
    Mikado, T
    Okumura, H
    Yoshida, S
    JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, 1997, 36 (11): : 6650 - 6660
  • [44] Lattice location study of low-fluence ion-implanted 124In in 3C-SiC
    Costa, A. R. G.
    Wahl, U.
    Correia, J. G.
    David-Bosne, E.
    Augustyns, V.
    Lima, T. A. L.
    Silva, D. J.
    da Silva, M. R.
    Bharuth-Ram, K.
    Pereira, L. M. C.
    JOURNAL OF APPLIED PHYSICS, 2019, 125 (21)
  • [45] AQUEOUS CORROSION BEHAVIOR OF ION-IMPLANTED METALS
    FERBER, H
    WOLF, GK
    MATERIALS SCIENCE AND ENGINEERING, 1987, 90 : 213 - 221
  • [46] ION-IMPLANTED COMPLEMENTARY IMPATT DIODES FOR D-BAND
    LEE, DH
    YING, RS
    PROCEEDINGS OF THE IEEE, 1974, 62 (09) : 1295 - 1296
  • [47] The behavior of ion-implanted hydrogen in gallium nitride
    Myers, SM
    Headley, TJ
    Hills, CR
    Han, J
    Petersen, GA
    Seager, CH
    Wampler, WR
    MRS INTERNET JOURNAL OF NITRIDE SEMICONDUCTOR RESEARCH, 1999, 4 : art. no. - G5.8
  • [48] CORROSION WEAR BEHAVIOR OF ION-IMPLANTED STEEL
    SHI, J
    GAO, MZ
    WANG, TM
    WEN, XY
    SHI, WD
    WEAR, 1994, 176 (02) : 145 - 149
  • [49] ELASTIC AND ANELASTIC BEHAVIOR OF ION-IMPLANTED SILICON
    TAN, SI
    BERRY, BS
    CROWDER, BL
    APPLIED PHYSICS LETTERS, 1972, 20 (02) : 88 - &
  • [50] WEAR BEHAVIOR OF ION-IMPLANTED STEEL SURFACES
    DIENEL, G
    KREISSIG, U
    RICHTER, E
    VACUUM, 1986, 36 (11-12) : 813 - 815
12345