PREPARATION OF COMPOSITIONALLY MODULATED BI-SR-CA-CU-O MULTILAYERED FILMS BY PLASMA CONTROLLED SPUTTERING

被引：10
|
作者：
KOINUMA, H
NAGATA, H
TAKANO, A
KAWASAKI, M
YOSHIMOTO, M
机构：
[1] SUMITOMO CEMENT CO LTD, CENT RES LAB, FUNABASHI, CHIBA 274, JAPAN
[2] UNIV TOKYO, FAC ENGN, DEPT IND CHEM, BUNKYO KU, TOKYO 113, JAPAN
来源：
JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS & EXPRESS LETTERS | 1988年 / 27卷 / 10期
关键词：
D O I：
10.1143/JJAP.27.L1887
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
引用
收藏
页码：L1887 / L1889
页数：3
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