CALCULATION OF CURRENT-VOLTAGE CHARACTERISTICS AND OF DEPOSITION RATE BY DIODE-SPUTTERING TECHNOLOGY

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作者：

KRAMAR, J

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来源：

VAKUUM-TECHNIK | 1978年 / 27卷 / 08期

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TH [机械、仪表工业];

学科分类号：

0802 ;

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页码：227 / 234

页数：8

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