CALCULATION OF THE CURRENT-VOLTAGE-PRESSURE CHARACTERISTICS OF DC DIODE SPUTTERING DISCHARGES

被引：26
|
作者：
MANIV, S
WESTWOOD, WD
SCANLON, PJ
机构：
[1] BELL NO RES,OTTAWA K1Y 4H7,ONTARIO,CANADA
[2] QUEENS UNIV,DEPT PHYS,KINGSTON K7L 3N6,ONTARIO,CANADA
来源：
JOURNAL OF APPLIED PHYSICS | 1982年 / 53卷 / 02期
关键词：
D O I：
10.1063/1.330550
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
引用
收藏
页码：856 / 860
页数：5
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