MODELING OF KINEMATICS OF THE PROCESS OF MAGNETIC-ABRASIVE POLISHING OF SILICON PLATES

被引：0
|
作者：
Khomich, N. S. [1 ]
Lugovik, A. Yu [1 ]
Fedortsev, R., V [1 ]
Korzun, A. E. [1 ]
Kukhto, P., V [1 ]
机构：
[1] Belarusian Natl Tech Univ, Sci & Engn Enterprise Polymag, Minsk, BELARUS
来源：
SCIENCE & TECHNIQUE | 2009年 / 01期
关键词：
D O I：
暂无
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
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页码：32 / 38
页数：8
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