ELECTRON-BEAM TESTING OF INTEGRATED-CIRCUITS

被引：1

|

作者：

REHME, H

机构：

来源：

PHYSICS IN TECHNOLOGY | 1979年 / 10卷 / 03期

关键词：

D O I：

10.1088/0305-4624/10/3/I02

中图分类号：

O4 [物理学];

学科分类号：

0702 ;

摘要：

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页码：97 / 103

页数：7

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