ELLIPSOMETRIC STUDY OF THIN-FILMS FORMED ON COPPER BY AQUEOUS BENZOTRIAZOLE AND BENZIMIDAZOLE

被引：38
|
作者：
HOBBINS, ND
ROBERTS, RF
机构：
来源：
SURFACE TECHNOLOGY | 1979年 / 9卷 / 04期
关键词：
D O I：
10.1016/0376-4583(79)90098-0
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
引用
收藏
页码：235 / 239
页数：5
相关论文
共 50 条
  • [1] AN ELLIPSOMETRIC STUDY OF THIN-FILMS ON SILICA PLATES FORMED BY ALKYLCHLOROSILYLATION REAGENTS
    TRAU, M
    MURRAY, BS
    GRANT, K
    GRIESER, F
    JOURNAL OF COLLOID AND INTERFACE SCIENCE, 1992, 148 (01) : 182 - 189
  • [2] ELLIPSOMETRIC STUDY OF SPRAY PYROLYZED CDS THIN-FILMS
    NOLLY, J
    ABDULLAH, KK
    VIJAYAKUMAR, KP
    PHYSICA STATUS SOLIDI A-APPLIED RESEARCH, 1987, 101 (01): : K35 - K38
  • [3] ELLIPSOMETRIC STUDY OF DIAMOND-LIKE THIN-FILMS
    PASCUAL, E
    SERRA, C
    ESTEVE, J
    BERTRAN, E
    SURFACE & COATINGS TECHNOLOGY, 1991, 47 (1-3): : 263 - 268
  • [4] ELLIPSOMETRIC CHARACTERIZATION OF THIN-FILMS AND SUPERLATTICES
    BREMER, J
    HUNDERI, O
    KONG, FP
    MATERIALS SCIENCE AND ENGINEERING B-SOLID STATE MATERIALS FOR ADVANCED TECHNOLOGY, 1990, 5 (02): : 285 - 289
  • [5] An Ellipsometric Study of the Oxidation of Thin Copper Films in Oxygen
    A. M. Khoviv
    I. N. Nazarenko
    A. A. Churikov
    Inorganic Materials, 2001, 37 : 473 - 475
  • [6] An ellipsometric study of the oxidation of thin copper films in oxygen
    Khoviv, AM
    Nazarenko, IN
    Churikov, AA
    INORGANIC MATERIALS, 2001, 37 (05) : 473 - 475
  • [7] ELLIPSOMETRIC MEASUREMENTS ON THERMALLY EVAPORATED THIN-FILMS
    HILTON, JW
    HILTON, WA
    AMERICAN JOURNAL OF PHYSICS, 1973, 41 (05) : 702 - 705
  • [8] CHOICE OF CRITERIA FOR ELLIPSOMETRIC DETERMINATIONS ON THIN-FILMS
    CAMAGNI, P
    MANARA, A
    THIN SOLID FILMS, 1972, 13 (02) : 341 - 350
  • [9] ERROR REDUCTION IN THE ELLIPSOMETRIC MEASUREMENT ON THIN-FILMS
    HO, JH
    LEE, CL
    LEI, TF
    SOLID-STATE ELECTRONICS, 1988, 31 (08) : 1321 - 1326
  • [10] ERROR EFFECTS IN THE ELLIPSOMETRIC INVESTIGATION OF THIN-FILMS
    RIEDLING, K
    THIN SOLID FILMS, 1981, 75 (04) : 355 - 369
12345