ERROR EFFECTS IN THE ELLIPSOMETRIC INVESTIGATION OF THIN-FILMS

被引：16
|
作者：
RIEDLING, K
机构：
来源：
THIN SOLID FILMS | 1981年 / 75卷 / 04期
关键词：
D O I：
10.1016/0040-6090(81)90258-3
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
引用
收藏
页码：355 / 369
页数：15
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