EFFECTS OF DIFFERENT ION-IMPLANTED DOPANT SPECIES ON THE SOLID-PHASE EPITAXY OF LINBO3 OPTICAL WAVE-GUIDES

被引：15

作者：

POKER, DB

THOMAS, DK

机构：

来源：

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS | 1989年 / 39卷 / 1-4期

关键词：

D O I：

10.1016/0168-583X(89)90881-1

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

引用

页码：716 / 719

页数：4

共 50 条

[21] ION-IMPLANTED OPTICAL-WAVEGUIDES IN LINBO3
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[29] TI-INDIFFUSED LINBO3 OPTICAL WAVE-GUIDES - A RANGE OF DIFFERENT TECHNOLOGIES
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[30] LINBO3 OPTICAL WAVE-GUIDES BY ZN DIFFUSION FROM VAPOR-PHASE
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