INFLUENCE OF ION SPUTTERING ON AUGER-ELECTRON SPECTROSCOPY DEPTH-PROFILING OF GAAS/ALGAAS SUPERSTRUCTURE

被引：11

|

作者：

MATSUNAGA, F

KAKIBAYASHI, H

MISHIMA, T

KAWASE, S

机构：

来源：

JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS | 1988年 / 27卷 / 01期

关键词：

D O I：

10.1143/JJAP.27.149

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

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页码：149 / 150

页数：2

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