OPTICAL-ABSORPTION AND REFRACTIVE-INDEX SPECTRA OF AMORPHOUS GAAS

被引:2
|
作者
FLOHR, T
HELBIG, R
机构
[1] Univ Erlangen-Nuernberg, Erlangen, West Ger, Univ Erlangen-Nuernberg, Erlangen, West Ger
关键词
SEMICONDUCTING FILMS - SEMICONDUCTOR MATERIALS - Processing;
D O I
10.1016/S0022-3093(86)80090-4
中图分类号
TQ174 [陶瓷工业]; TB3 [工程材料学];
学科分类号
0805 ; 080502 ;
摘要
Optical absorption and refractive index spectra of amorphous GaAs samples are measured in the wavelength range of 800-2000 nm using the photoacoustic technique. Three different samples with 0, 5 and 40% H//2 in the glow-discharge gas during fabrication are examined. The refractive index of the samples depends strongly on the content of hydrogen in the fabrication atmosphere.
引用
收藏
页码:94 / 96
页数:3
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