MEASUREMENT OF THE OXYGEN AND CARBON CONTENT OF SILICON-WAFERS BY FOURIER-TRANSFORM IR SPECTROPHOTOMETRY

被引：0
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作者：
BAGHDADI, A
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来源：
ACS SYMPOSIUM SERIES | 1986年 / 295卷
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中图分类号：
O6 [化学];
学科分类号：
0703 ;
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页码：208 / 229
页数：22
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