MEASUREMENT OF THE OXYGEN AND CARBON CONTENT OF SILICON-WAFERS BY FOURIER-TRANSFORM IR SPECTROPHOTOMETRY

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作者：

BAGHDADI, A

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来源：

ACS SYMPOSIUM SERIES | 1986年 / 295卷

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O6 [化学];

学科分类号：

0703 ;

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页码：208 / 229

页数：22

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