The Multifractal Investigation of Surface Microgeometry of (Ti-Hf-Zr-V-Nb)N Nitride Coatings

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作者：
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来源：
JOURNAL OF NANO- AND ELECTRONIC PHYSICS | 2014年 / 6卷 / 04期
关键词：
Nitride coating; Surface morphology; Multifractal analysis;
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中图分类号：
TB3 [工程材料学];
学科分类号：
0805 ; 080502 ;
摘要：
The qualitative investigation of the morphology of (Ti-Hf-Zr-V-Nb) N nitride coatings depending on the bias potential of the substrate was performed. The two-dimensional multifractal fluctuation analysis was used for the quantitative analysis of the changes in microscopic irregularities. The calculation of statistical parameters (generalized Hurst exponent and multifractal spectrum) indicates compliance with theoretical calculations and experimental studies, namely, smoothing of the coating surface with the increasing energy.
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页数：4
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