EPITAXIAL (100) SILICON FILMS GROWN AT LOW-TEMPERATURES IN AN ELECTRON-BEAM EVAPORATOR

被引：2
|
作者：
MILOSAVLJEVIC, M
JEYNES, C
WILSON, IH
机构：
来源：
JOURNAL OF APPLIED PHYSICS | 1985年 / 57卷 / 04期
关键词：
D O I：
10.1063/1.334522
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
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页码：1252 / 1255
页数：4
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