SUB-MICRON LITHOGRAPHY

被引：0

作者：

BLAIS, PD

机构：

来源：

关键词：

D O I：

10.1117/12.7973076

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

引用

页码：175 / 175

页数：1

共 50 条

[1] SUB-MICRON LITHOGRAPHY TECHNIQUES
LAWES, RA
APPLIED SURFACE SCIENCE, 1989, 36 (1-4) : 485 - 499
[2] SUB-MICRON OPTICAL LITHOGRAPHY
ROUSSEL, JM
PROCEEDINGS OF THE SOCIETY OF PHOTO-OPTICAL INSTRUMENTATION ENGINEERS, 1981, 275 : 9 - 16
[3] THE SUB-MICRON LITHOGRAPHY LABYRINTH
BROERS, AN
SOLID STATE TECHNOLOGY, 1985, 28 (06) : 119 - 126
[4] TOWARD SUB-MICRON LITHOGRAPHY
LONG, ML
PROCEEDINGS OF THE SOCIETY OF PHOTO-OPTICAL INSTRUMENTATION ENGINEERS, 1981, 275 : 2 - 8
[5] REDUCTION LENSES FOR SUB-MICRON LITHOGRAPHY
OMATA, T
SOLID STATE TECHNOLOGY, 1984, 27 (09) : 173 - 177
[6] LITHOGRAPHY FOR A SUB-MICRON CMOS PROCESS
POPPERT, P
NOVAK, S
WRIGHT, P
PROCEEDINGS OF THE SOCIETY OF PHOTO-OPTICAL INSTRUMENTATION ENGINEERS, 1985, 538 : 46 - 50
[7] MICRON AND SUB-MICRON LITHOGRAPHY FOR VLSI DEVICE FABRICATION
VARNELL, GL
SCANNING ELECTRON MICROSCOPY, 1981, : 343 - 350
[8] OPTICAL PROJECTION LITHOGRAPHY IN THE SUB-MICRON RANGE
ARDEN, W
KELLER, H
MADER, L
SOLID STATE TECHNOLOGY, 1983, 26 (07) : 143 - 150
[9] RESIST SCHEMES FOR SUB-MICRON OPTICAL LITHOGRAPHY
COOPMANS, F
JOURNAL DE PHYSIQUE, 1988, 49 (C-4): : 723 - 734
[10] Wafer-scale sub-micron lithography
School of Chemical Engineering, Seoul National University, Seoul, 151-742, Korea, Republic of
Appl Phys Lett, 17 (2599-2601):