DEFECTS AND MICROVOIDS IN A-SI AND A-SI-H

被引:17
|
作者
JUNG, AL
WANG, YH
LIU, G
XIONG, JJ
CAO, BS
YU, WZ
ADLER, D
机构
[1] QUINGHUA UNIV,DEPT PHYS,BEIJING,PEOPLES R CHINA
[2] MIT,CTR MAT SCI & ENGN,CAMBRIDGE,MA 02139
关键词
HYDROGENATED AMORPHOUS SILICON - POSITRON ANNIHILATION SPECTRA;
D O I
10.1016/0022-3093(85)90396-5
中图分类号
TQ174 [陶瓷工业]; TB3 [工程材料学];
学科分类号
0805 ; 080502 ;
摘要
(Edited Abstract)
引用
收藏
页码:19 / 24
页数:6
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