A NEW INTERFEROMETRIC ALIGNMENT TECHNIQUE WITH HOLOGRAPHIC CONFIGURATION

被引：2
|
作者：
NOMURA, N
MATSUMURA, T
YONEZAWA, T
KUGIMIYA, K
机构：
来源：
JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS | 1985年 / 24卷 / 11期
关键词：
D O I：
10.1143/JJAP.24.1555
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
引用
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页码：1555 / 1560
页数：6
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