INFLUENCE OF ELECTRON-IRRADIATION ON PHYSICAL-PROPERTIES OF GERMANIUM-DOPED SILICON SINGLE-CRYSTALS

被引:0
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作者
DASHEVSKII, MY
KORLYAKOV, DN
LADYGIN, EA
MUSALITIN, AM
SHILIN, BA
机构
来源
SOVIET PHYSICS SEMICONDUCTORS-USSR | 1990年 / 24卷 / 12期
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中图分类号
O469 [凝聚态物理学];
学科分类号
070205 ;
摘要
An investigation was made of dislocation-free silicon single crystals which were either doped with germanium (N(Ge) = 10(20) cm-3) or undoped. They exhibited n- or p-type conduction and were grown by the Czochralski method along the <111> direction. The concentration of phosphorus or boron was approximately 10(14) and 10(15) cm-3 in n- and p-type crystals, respectively. These single crystals were irradiated with fast (E = 6 MeV) electrons in doses of D = 5 x 10(12) - 10(17) cm-2 and were then subjected to isochronous annealing for 30 min in the temperature range 200-1000-degrees-C. The process of formation of radiation defects in the germanium-doped single crystals differed from those in the undoped silicon. Introduction of germanium into single-crystal silicon reduced somewhat its radiation sensitivity and tended to restore (after annealing) the minority carrier lifetime in the irradiated material.
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页码:1289 / 1292
页数:4
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