PROLOG TO CHALLENGES IN MANUFACTURING SUBMICRON, ULTRA-LARGE SCALE INTEGRATED-CIRCUITS - A TUTORIAL INTRODUCTION

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作者：
BRAHAM, R
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来源：
PROCEEDINGS OF THE IEEE | 1990年 / 78卷 / 11期
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TM [电工技术]; TN [电子技术、通信技术];
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0808 ; 0809 ;
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页码：1685 / 1686
页数：2
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