PURITY CONSIDERATIONS FOR AMORPHOUS-SILICON THIN-FILMS

被引:0
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作者
DICKSON, CR
FIESELMANN, BF
OSWALD, RS
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D O I
10.1016/0022-0248(88)90071-1
中图分类号
O7 [晶体学];
学科分类号
0702 ; 070205 ; 0703 ; 080501 ;
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页码:49 / 61
页数:13
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