ANODE SPUTTERING CHARACTERISTICS OF BERKELEY 2.5 MV SOURCE

被引：5
|
作者：
GAVIN, B [1 ]
机构：
[1] UNIV CALIF,LAWRENCE BERKELEY LAB,BERKELEY,CA 94720
来源：
IEEE TRANSACTIONS ON NUCLEAR SCIENCE | 1976年 / 23卷 / 02期
关键词：
D O I：
10.1109/TNS.1976.4328393
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
引用
收藏
页码：1008 / 1012
页数：5
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