FABRICATION OF LOW-LOSS 45-DEGREES INTEGRATED MIRRORS ON DIELECTRIC OPTICAL WAVE-GUIDES

High-density low-loss dielectric optical intel connection is demonstrated on a monomode optical waveguide compatible with microelectronics technology. Low-loss self-aligned integrated mirrors (SAIM) on a dielectric (polyimide-silicon nitride-polyimide) optical waveguide have been fabricated Optimization of the reactive ion etching process has been made in order to obtain vertical, homogeneous etched sidewalls. Using such a process, 45 degrees integrated mirrors present reflection losses of 0.6 dB at a 830-nm wavelength (quasi-TE mode). (C) 1995 John Wiley and Sons, Inc.